AlGaN MSM Photodetectors with SiN/GaN double buffer layers

Y. D. Jhou; S. J. Chang; Y. K. Su; C. H. Liu; M. L. Lee; M. R. Wu

doi:https://doi.org/10.7567/SSDM.2007.P-7-10

[P-7-10] AlGaN MSM Photodetectors with SiN/GaN double buffer layers

Y. D. Jhou, S. J. Chang, Y. K. Su, C. H. Liu, M. L. Lee, M. R. Wu (1.Institute of Microelectronics & Department of Electrical Engineering Advanced Optoelectronic Technology Center National Cheng Kung University, 2.Institute of Nanotechnology and Microsystems Engineering National Cheng Kung University)

https://doi.org/10.7567/SSDM.2007.P-7-10

2007 International Conference on Solid State Devices and Materials

[P-7-10] AlGaN MSM Photodetectors with SiN/GaN double buffer layers