[P-7-13] A study of deposition single crystal SiCN thin film on porous silicon for ultraviolet light detecting applications

Tse-Heng Chou, Yean-Kuen Fang, Ta-Wei Kuo, D. H. Jaw, F. S. Lai, J F Huang, J. S. Shie (1.VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University, 2.Department of Electronic Engineering, Wufeng Institute of Technology)

https://doi.org/10.7567/SSDM.2007.P-7-13