[P-7-13] A study of deposition single crystal SiCN thin film on porous silicon for ultraviolet light detecting applications

Tse-Heng Chou、Yean-Kuen Fang、Ta-Wei Kuo、D. H. Jaw、F. S. Lai、J F Huang、J. S. Shie (1.VLSI Technology Laboratory, Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University、2.Department of Electronic Engineering, Wufeng Institute of Technology)

https://doi.org/10.7567/SSDM.2007.P-7-13