[P-7-15] GaN Ultraviolet MSM Photodetectors by capping a Low-Temperature AlN Layer

K. H. Lee, P. C. Chang, Y. C. Wang, C. L. Yu, S. J. Chang (1.Institute of Microelectronics and Department of Electrical Engineering, National Cheng Kung University, 2.Department of Electronic Engineering, Nan Jeon Institute of Technology)

https://doi.org/10.7567/SSDM.2007.P-7-15