The Japan Society of Applied Physics

[P-7-16] GaInNAs/GaAs p-i-n Photodetector with Multiquantum Well Structure

Yung-Feng Chen, Wei-Cheng Chen, Ricky W. Chuang, Yan-Kuin Su, Huo-Lieh Tsai (1.Institute of Microelectronics and Advanced Optoelectronic Technology Center, National Cheng Kung University, 2.Advanced Device Technology Department, Taiwan Semiconductor Manufacturing Company Ltd.)

https://doi.org/10.7567/SSDM.2007.P-7-16