[P-7-5] Observation of Ultraviolet-Light Emission from Si/SiO2 Multilayer Films Prepared by Using RF Magnetron Sputtering

Kenta Miura、Yuji Kato、Hitomi Hoshino、Osamu Hanaizumi (1.Department of Electronic Engineering, Graduate School of Engineering, Gunma University)

https://doi.org/10.7567/SSDM.2007.P-7-5