[P-8-1] Self organized Micro Cones on Si substrate by Microwave Plasma Chemical Vapor Deposition

Masataka Moriya, Yuji Matsumoto, Yoshinao Mizugaki, Tadayuki Kobayashi, Koichi Usami (1.The University of Electro-Communications, Dept. of Electronic Engineering)

https://doi.org/10.7567/SSDM.2007.P-8-1