Self organized Micro Cones on Si substrate by Microwave Plasma Chemical Vapor Deposition

Masataka Moriya; Yuji Matsumoto; Yoshinao Mizugaki; Tadayuki Kobayashi; Koichi Usami

doi:https://doi.org/10.7567/SSDM.2007.P-8-1

2007 International Conference on Solid State Devices and Materials

2007年9月18日〜 2007年9月21日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-8-1] Self organized Micro Cones on Si substrate by Microwave Plasma Chemical Vapor Deposition

Masataka Moriya、Yuji Matsumoto、Yoshinao Mizugaki、Tadayuki Kobayashi、Koichi Usami (1.The University of Electro-Communications, Dept. of Electronic Engineering)

https://doi.org/10.7567/SSDM.2007.P-8-1

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