[P-8-14] Fabrication and characteristics of the low resistivity p-type ZnO thin films by nitrogen ion implantation

Shu-Yi Tsai、Yang-Ming Lu、Min-Hsiung Hon (1.Department of Materials Science and Engineering, National Cheng Kung University、2.Graduate Institute of Electro-Optics, National University of Tainan)

https://doi.org/10.7567/SSDM.2007.P-8-14