[P-8-16] Properties of Zinc Oxide Films Cosputtered with Various Aluminum Contents at Room Temperature

Day-Shan Liu, Cheng-Wei Sheu, Fu-Chun Tsai, Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University, 2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2007.P-8-16