[P-8-17] Activation of Nitrogen-acceptors in Al-N Codoped Zinc Oxide Films Prepared by Radio Frequency Magnetron Cosputtering Technology

Day-Shan Liu, Cheng - Yang Wu, Chia-Shan Shei, Ching-Ting Lee (1.Institute of Electro-Optical and Materials Science, National Formosa University, 2.Institute of Microelectronics, Department of Electrical Engineering, National Cheng Kung University)

https://doi.org/10.7567/SSDM.2007.P-8-17