[P-8-4] Lateral Recrystallized Si Thin Films with Large Tensile Strain for High Performance Thin Film Transistors

Shuntaro Fujii, Shin-Ichiro Kuroki, Zhu Xiaoli, Masayuki Numata, Koji Kotani, Takashi Ito (1.Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2007.P-8-4