[P-8-4] Lateral Recrystallized Si Thin Films with Large Tensile Strain for High Performance Thin Film Transistors

Shuntaro Fujii、Shin-Ichiro Kuroki、Zhu Xiaoli、Masayuki Numata、Koji Kotani、Takashi Ito (1.Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2007.P-8-4