[P-8-5] High-Performance LTPS-TFTs Fabricated by Continuous Wave Laser Annealing

Chun-Chien Tsai、Kai-Fang Wei、Yao-Jen Lee、Jyh-Liang Wang、I-Che Lee、Huang-Chung Cheng (1.Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University、2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2007.P-8-5