[P-8-5] High-Performance LTPS-TFTs Fabricated by Continuous Wave Laser Annealing

Chun-Chien Tsai, Kai-Fang Wei, Yao-Jen Lee, Jyh-Liang Wang, I-Che Lee, Huang-Chung Cheng (1.Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, 2.National Nano Device Laboratories)

https://doi.org/10.7567/SSDM.2007.P-8-5