The Japan Society of Applied Physics

[P-8-9] The Elimination of Inversion Domains in MBE-GaN Grown Using Low Temperature Nitridation

Jet-Chung Chang、Tsung-Hsi Yang、Shih-Guo Shen、Yi-Cheng Chen、Jui-Tai Ku、Chun-Yen Chang (1.Department of Electronics Engineering, Nation Chiao Tung University、2.Microelectronics and Information Systems Research Center, Nation Chiao Tung University、3.Department of Electrophysics, Nation Chiao Tung University)

https://doi.org/10.7567/SSDM.2007.P-8-9