[P-9-5] Fabrication of InGaN/GaN Multiple Quantum Wells Nanopillars by Focused Ion Beam Milling

Shang-En Wu、Tao-Hung Hsueh、Chuan-Pu Liu、Jinn-Kong Sheu、Wei-Chih Lai、Shoou-Jinn Chang (1.Department of Materials Science & Engineering National Cheng Kung University、2.Center for Micro/Nano Science and Technology National Cheng Kung University、3.Institute of Electro-Optical Science and Engineering National Cheng Kung University、4.Institute of Microelectronics & Department of Electrical Engineering National Cheng Kung University)

https://doi.org/10.7567/SSDM.2007.P-9-5