[P-9-5] Fabrication of InGaN/GaN Multiple Quantum Wells Nanopillars by Focused Ion Beam Milling

Shang-En Wu, Tao-Hung Hsueh, Chuan-Pu Liu, Jinn-Kong Sheu, Wei-Chih Lai, Shoou-Jinn Chang (1.Department of Materials Science & Engineering National Cheng Kung University, 2.Center for Micro/Nano Science and Technology National Cheng Kung University, 3.Institute of Electro-Optical Science and Engineering National Cheng Kung University, 4.Institute of Microelectronics & Department of Electrical Engineering National Cheng Kung University)

https://doi.org/10.7567/SSDM.2007.P-9-5