[P-9-9] Chemical Bonding Self-Organizations in Non-crystalline Hf Si Oxynitride Dielectrics:Low Direct Tunneling and Defect Levels Comparable to SiO2

S. Lee、H. Seo、G. Lucovsky、J.C. Phillips (1.North Carolina State University、2.Rutgers University)

https://doi.org/10.7567/SSDM.2007.P-9-9