Transparent AZO-Gated Double δ-Doped AlGaAs/InGaAs HEMTs

B. Y. Chou; C. S. Lee; W. C. Hsu; S. Y. Chu; Y. N. Lai; C. S. Ho; Z. L. Tseng; M. F. Shih

doi:https://doi.org/10.7567/SSDM.2009.P-6-15

2009 International Conference on Solid State Devices and Materials

2009年10月6日〜 2009年10月9日
Sendai Kokusai Hotel, Miyagi, Japan

[P-6-15] Transparent AZO-Gated Double δ-Doped AlGaAs/InGaAs HEMTs

B. Y. Chou¹、C. S. Lee¹、W. C. Hsu²、S. Y. Chu²、Y. N. Lai²、C. S. Ho²、Z. L. Tseng²、M. F. Shih² (1.Feng Chia Univ.(Taiwan)、2.National Cheng Kung Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-6-15

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