[A-9-4] Diffuser micropump structured with extremely flexible diaphragm of 2 micron-thick polyimide film

Y. Liu¹, H. Komatsuzaki¹, Z. Duan¹, Y. Nishioka¹ (1.Nihon Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.A-9-4