GeO Desorption Mechanism from GeO<sub>2</sub>/Ge Stack Determined by <sup>73</sup>Ge Labeling Technique in Thermal Desorption Spectroscopy (TDS) Analysis

2010 International Conference on Solid State Devices and Materials

Sep 21, 2010 - Sep 24, 2010
The University of Tokyo, Tokyo, Japan

S. K. Wang¹, K. Kita^1,2, T. Nishimura^1,2, K. Nagashio^1,2, A. Toriumi^1,2 (1.Univ. of Tokyo, 2.JST-CREST , Japan)