[B-2-4] GeO Desorption Mechanism from GeO₂/Ge Stack Determined by ⁷³Ge Labeling Technique in Thermal Desorption Spectroscopy (TDS) Analysis

S. K. Wang¹, K. Kita^1,2, T. Nishimura^1,2, K. Nagashio^1,2, A. Toriumi^1,2 (1.Univ. of Tokyo, 2.JST-CREST , Japan)

https://doi.org/10.7567/SSDM.2010.B-2-4