[B-5-4] Stability origin of metastable higher-k phase HfO₂ at room temperature

Y. Nakajima¹、K. Kita¹、T. Nishimura¹、K. Nagashio¹、A. Toriumi¹ (1.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2010.B-5-4