[B-5-4] Stability origin of metastable higher-k phase HfO₂ at room temperature

Y. Nakajima¹, K. Kita¹, T. Nishimura¹, K. Nagashio¹, A. Toriumi¹ (1.Univ. of Tokyo , Japan)

https://doi.org/10.7567/SSDM.2010.B-5-4