Dopant/carrier profiling in nanostructures.

W. Vandervorst; P. Eyben; A. Schulze; J. Mody; S. Koelling; A. Kambham; M. Gilbert

doi:https://doi.org/10.7567/SSDM.2010.B-7-1

2010 International Conference on Solid State Devices and Materials

Sep 21, 2010 - Sep 24, 2010
The University of Tokyo, Tokyo, Japan

[B-7-1] Dopant/carrier profiling in nanostructures.

W. Vandervorst^1,2, P. Eyben¹, A. Schulze^1,2, J. Mody^1,2, S. Koelling^1,2, A. Kambham^1,2, M. Gilbert¹ (1.IMEC, 2.Instituut voor Kern- en Stralingsfysica , Belgium)

https://doi.org/10.7567/SSDM.2010.B-7-1

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