[B-7-3] Contribution of Carbon to Growth of Boron-Containing Cluster in Heavily B-doped Silicon

H. Itokawa^1,2、A. Ohta²、M. Ikeda²、I. Mizushima¹、S. Miyazaki² (1.Toshiba Corp.、2.Hiroshima Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.B-7-3