[B-7-3] Contribution of Carbon to Growth of Boron-Containing Cluster in Heavily B-doped Silicon

H. Itokawa^1,2, A. Ohta², M. Ikeda², I. Mizushima¹, S. Miyazaki² (1.Toshiba Corp., 2.Hiroshima Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.B-7-3