[B-9-4] Quantitative Analysis of Stress Relaxation in TEM specimen fabrication by Raman Spectroscopy with High-NA Oil-Immersion Lens

D. Kosemura^1,2, A. Ogura¹ (1.Meiji Univ., 2.JSPS , Japan)

https://doi.org/10.7567/SSDM.2010.B-9-4