[B-9-5] Uniaxial and Biaxial Strain Distribution Mapping in SOI Micro-Structures by Polarized Raman Spectroscopy

M. Kurosawa^1,2, T. Sadoh¹, M. Miyao¹ (1.Kyushu Univ., 2.JSPS , Japan)

https://doi.org/10.7567/SSDM.2010.B-9-5