[B-9-5] Uniaxial and Biaxial Strain Distribution Mapping in SOI Micro-Structures by Polarized Raman Spectroscopy

M. Kurosawa^1,2、T. Sadoh¹、M. Miyao¹ (1.Kyushu Univ.、2.JSPS , Japan)

https://doi.org/10.7567/SSDM.2010.B-9-5