[C-1-4] Layout Dependent STI Stress Effect on High Frequency Performance and Flicker Noise in Nanoscale CMOS Devices

K. L. Yeh¹, C. Y. Ku¹, J. C. Guo¹ (1.National Chiao Tung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2010.C-1-4