[C-3-4] Metal Schottky S/D Technology of Ultra Thin SOTB (Silicon on Thin Box) MOSFET

A. Shima¹, N. Sugii¹, N. Mise¹, D. Hisamoto¹, K. Takeda¹, K. Torii¹ (1.Hitachi, Ltd. , Japan)

https://doi.org/10.7567/SSDM.2010.C-3-4