[D-3-3] Epitaxial-Lateral-Overgrowth of Gallium Nitride for Embedding the Micro-Mirror Array

H. M. Ku¹, C. Y. Huang^1,2, C. Z. Liao², S. Chao¹ (1.National Tsing Hua Univ., 2.Indus. Tech. Res. Inst. , Taiwan)

https://doi.org/10.7567/SSDM.2010.D-3-3