[D-7-3] Enhanced Sensitivity of SOI Photodiode by Au Nanoparticles

Y. Matsuo¹, A. Ono¹, H. Satoh¹, H. Inokawa¹ (1.Shizuoka Univ. , Japan)

https://doi.org/10.7567/SSDM.2010.D-7-3