[D-8-2] Loss Measurement of Multiple Layer a-Si Waveguides toward 3D Si-Optical Circuits

J. H. Kang¹、K. Inoue¹、Y. Atsumi¹、N. Nishiyama¹、S. Arai¹ (1.Tokyo Tech , Japan)

https://doi.org/10.7567/SSDM.2010.D-8-2