The Japan Society of Applied Physics

[E-1-4] An analysis of Conduction Mechanism and Reliability Characteristics of MIM Capacitor with Single ZrO2 Layer

H. M. Kwon1, I. S. Han1, S. U. Park1, J. D. Bok1, Y. J. Jung1, H. S. Shin1, C. Y. Kang2, B. H. Lee3, R. Jammy2, H. D. Lee1 (1.Chungnam National Univ., 2.SEMATECH, 3.GIST , Korea)

https://doi.org/10.7567/SSDM.2010.E-1-4