An analysis of Conduction Mechanism and Reliability Characteristics of MIM Capacitor with Single ZrO<sub>2</sub> Layer

H. M. Kwon; I. S. Han; S. U. Park; J. D. Bok; Y. J. Jung; H. S. Shin; C. Y. Kang; B. H. Lee; R. Jammy; H. D. Lee

doi:https://doi.org/10.7567/SSDM.2010.E-1-4

[E-1-4] An analysis of Conduction Mechanism and Reliability Characteristics of MIM Capacitor with Single ZrO₂ Layer

H. M. Kwon¹、I. S. Han¹、S. U. Park¹、J. D. Bok¹、Y. J. Jung¹、H. S. Shin¹、C. Y. Kang²、B. H. Lee³、R. Jammy²、H. D. Lee¹ (1.Chungnam National Univ.、2.SEMATECH、3.GIST , Korea)

https://doi.org/10.7567/SSDM.2010.E-1-4

2010 International Conference on Solid State Devices and Materials

[E-1-4] An analysis of Conduction Mechanism and Reliability Characteristics of MIM Capacitor with Single ZrO2 Layer

[E-1-4] An analysis of Conduction Mechanism and Reliability Characteristics of MIM Capacitor with Single ZrO₂ Layer