[G-9-3L] Carbon nanotube-based sensor Device compatible with the CMOS process

J. T. Huang¹, P. L. Hsu¹, T. H. Lin¹, W. T. Hsieh¹, K. Y. Lee¹, C. K. Chen¹, T. C. Tsai¹ (1.National Taipei Univ. of Tech. , Taiwan)

https://doi.org/10.7567/SSDM.2010.G-9-3L