[G-9-3L] Carbon nanotube-based sensor Device compatible with the CMOS process

J. T. Huang¹、P. L. Hsu¹、T. H. Lin¹、W. T. Hsieh¹、K. Y. Lee¹、C. K. Chen¹、T. C. Tsai¹ (1.National Taipei Univ. of Tech. , Taiwan)

https://doi.org/10.7567/SSDM.2010.G-9-3L