[H-2-2] Uniformity of Graphene CVD Growth Depending on the Thickness and Domain Structure of Epitaxial Metal Films

S. Yoshii¹, K. Nozawa¹, K. Toyoda¹, N. Matsukawa¹ (1.Panasonic Corp. , Japan)

https://doi.org/10.7567/SSDM.2010.H-2-2