The Japan Society of Applied Physics

[H-3-1] Crack-Free Epitaxial ZnO film on Si(111) with Gd2O3(Ga2O3) buffer layer

B. H. Lin1,2, W. R. Liu1,2, C. C. Kuo1, C. H. Hsu2,1, W. F. Hsieh1,3, M. Hong4, J. Kwo4 (1.National Chiao Tung Univ., 2.National Synchrotron Radiation Research Center, 3.National Cheng Kung Univ., 4.National Tsing Hua Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2010.H-3-1