[H-4-3] Carbon Nanotube Growth for Vias and Interconnects

J. Robertson¹、C. S. Esconjauregui¹、B. C. Bayer¹、F. Yan¹、G. Zhong¹、J. Dijon²、H. Okuna² (1.Cambridge Univ. , UK、2.CEA , France)

https://doi.org/10.7567/SSDM.2010.H-4-3