[H-4-3] Carbon Nanotube Growth for Vias and Interconnects

J. Robertson¹, C. S. Esconjauregui¹, B. C. Bayer¹, F. Yan¹, G. Zhong¹, J. Dijon², H. Okuna² (1.Cambridge Univ. , UK, 2.CEA , France)

https://doi.org/10.7567/SSDM.2010.H-4-3