Advanced Organic Polymers for the Aggressive Scaling of Low-k Materials

M. Pantouvaki; L. Zhao; C. Huffman; N. Heylen; Y. Ono; M. Nakajima; K. Nakatani; G. P. Beyer; M. R. Baklanov

doi:https://doi.org/10.7567/SSDM.2010.H-5-1

[H-5-1] Advanced Organic Polymers for the Aggressive Scaling of Low-k Materials

M. Pantouvaki¹, L. Zhao², C. Huffman¹, N. Heylen¹, Y. Ono³, M. Nakajima³, K. Nakatani³, G. P. Beyer¹, M. R. Baklanov¹ (1.IMEC, 2.Intel Corp. , Belgium, 3.Sumitomo Bikelite Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2010.H-5-1

2010 International Conference on Solid State Devices and Materials

[H-5-1] Advanced Organic Polymers for the Aggressive Scaling of Low-k Materials