DMOTMDS/MTMOS Multi-Stacked SiOCH films for Super-Low-k and Sufficient Modulus Formed by Damage-free Neutral Beam Enhanced CVD

T. Sasaki; S. Yasuhara; T. Shimayama; K. Tajima; H. Yano; S. Kadomura; M. Yoshimaru; N. Matsunaga; S. Samukawa

doi:https://doi.org/10.7567/SSDM.2010.H-5-2

[H-5-2] DMOTMDS/MTMOS Multi-Stacked SiOCH films for Super-Low-k and Sufficient Modulus Formed by Damage-free Neutral Beam Enhanced CVD

T. Sasaki¹, S. Yasuhara¹, T. Shimayama², K. Tajima², H. Yano², S. Kadomura², M. Yoshimaru², N. Matsunaga², S. Samukawa¹ (1.Tohoku Univ., 2.STARC , Japan)

https://doi.org/10.7567/SSDM.2010.H-5-2

2010 International Conference on Solid State Devices and Materials

[H-5-2] DMOTMDS/MTMOS Multi-Stacked SiOCH films for Super-Low-k and Sufficient Modulus Formed by Damage-free Neutral Beam Enhanced CVD