Characterization of LTO coating on microlens of CMOS image sensor

J. Gambino; B. Leidy; C. Musante; K. Ackerson; B. Guthrie; J. Twombly; E. Cooney; P. Pokrinchak; D. Meatyard; J. Adkisson; R. Rassel; M. Jaffe

doi:https://doi.org/10.7567/SSDM.2010.H-9-1

2010 International Conference on Solid State Devices and Materials

2010年9月21日〜 2010年9月24日
The University of Tokyo, Tokyo, Japan

[H-9-1] Characterization of LTO coating on microlens of CMOS image sensor

J. Gambino¹、B. Leidy¹、C. Musante¹、K. Ackerson¹、B. Guthrie¹、J. Twombly¹、E. Cooney¹、P. Pokrinchak¹、D. Meatyard¹、J. Adkisson¹、R. Rassel¹、M. Jaffe¹ (1.IBM , USA)

https://doi.org/10.7567/SSDM.2010.H-9-1

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