MEMS Resonance Test for Mechanical Characterization of Nano-Scale Thin Films

H. Yamagiwa; D. Goto; T. Namazu; T. Takeuchi; K. Murakami; Y. Kawashimo; T. Takano; K. Yoshiki; S. Inoue

doi:https://doi.org/10.7567/SSDM.2010.H-9-3L

[H-9-3L] MEMS Resonance Test for Mechanical Characterization of Nano-Scale Thin Films

H. Yamagiwa¹、D. Goto¹、T. Namazu¹、T. Takeuchi²、K. Murakami²、Y. Kawashimo²、T. Takano³、K. Yoshiki¹、S. Inoue¹ (1.Univ. of Hyogo、2.Shinko Seiki Co. Ltd.、3.The New Industry Research Organization , Japan)

https://doi.org/10.7567/SSDM.2010.H-9-3L

2010 International Conference on Solid State Devices and Materials

[H-9-3L] MEMS Resonance Test for Mechanical Characterization of Nano-Scale Thin Films