Adding Value to CMOS through Heterogeneous Integration

Y. Royter; P. R. Patterson; J. C. Li; K. R. Elliot; T. Hussain; M. F. Boag-O'Bryen; J. R. Duvall; M. C. Montes; D. A. Hitko; M. Sokolich; D. H. Chow; P. D. Brewer

doi:https://doi.org/10.7567/SSDM.2010.I-1-1

[I-1-1] Adding Value to CMOS through Heterogeneous Integration

Y. Royter¹, P. R. Patterson¹, J. C. Li¹, K. R. Elliot¹, T. Hussain¹, M. F. Boag-O'Bryen¹, J. R. Duvall¹, M. C. Montes¹, D. A. Hitko¹, M. Sokolich¹, D. H. Chow¹, P. D. Brewer¹ (1.HRL Laboratories, LLC , USA)

https://doi.org/10.7567/SSDM.2010.I-1-1

2010 International Conference on Solid State Devices and Materials

[I-1-1] Adding Value to CMOS through Heterogeneous Integration