The Japan Society of Applied Physics

[I-1-1] Adding Value to CMOS through Heterogeneous Integration

Y. Royter1、P. R. Patterson1、J. C. Li1、K. R. Elliot1、T. Hussain1、M. F. Boag-O'Bryen1、J. R. Duvall1、M. C. Montes1、D. A. Hitko1、M. Sokolich1、D. H. Chow1、P. D. Brewer1 (1.HRL Laboratories, LLC , USA)

https://doi.org/10.7567/SSDM.2010.I-1-1